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Journal Articles

Characterization of epitaxial TiO$$_{2}$$ films prepared by pulsed laser deposition

Yamamoto, Shunya; Sumita, Taishi; Yamaki, Tetsuya; Miyashita, Atsumi; Naramoto, Hiroshi

Journal of Crystal Growth, 237-239(Part1), p.569 - 573, 2002/04

The epitaxial growth of TiO$$_{2}$$ films has attracted much interest from the viewpoints of basic science and applications. In the present study, it is shown that TiO$$_{2}$$ films with anatase or rutile structure can be grown by pulsed laser deposition(PLD) with an ArF excimer laser under the controlled O$$_{2}$$ atmosphere. The TiO$$_{2}$$ films were prepared on the LaAlO$$_{3}$$, LSAT SrTiO$$_{3}$$ and $$alpha$$-Al$$_{2}$$O$$_{3}$$ single crystal substrates. The epitaxial films were analyzed by RBS and X-ray diffraction for investigating the crystallographic relationships with the substrates. The high quality anatase TiO$$_{2}$$(001) films have been successfully grown on the LaAlO$$_{3}$$ (001), LSAT (001) and SrTiO$$_{3}$$ (001) substrates at temperatures above 500$$^{circ}$$C. Also the high quality rutile TiO$$_{2}$$(100) and (001) films were obtained on the $$alpha$$-Al$$_{2}$$O$$_{3}$$ (0001) and (10-10), respectively.The optical properties were characterized by optical absorption measurements. The optical band gaps for anatase and rutile TiO$$_{2}$$ epitaxial films were evaluated to be 3.22 eV and 3.11 eV, respectively.

Journal Articles

Preparation of epitaxial TiO$$_{2}$$ films by PLD for photocatalyst applications

Yamaki, Tetsuya; Sumita, Taishi; Yamamoto, Shunya; Miyashita, Atsumi

Journal of Crystal Growth, 237-239(Part1), p.574 - 579, 2002/04

Pulsed laser deposition (PLD) with a KrF excimer laser was used to prepare epitaxial TiO$$_{2}$$ films on a (0001) sapphire substrate. The crystalline structure and surface morphology of the films were then investigated as a function of the laser power density in the PLD. X-ray diffraction and Raman spectroscopy results showed that the films were composed of the (100) oriented rutile phase with a small amount of the (001) oriented anatase. The anatase-to-rutile ratio in such phase-mixed films was controlled by the laser power; the ratio increased as the power density decreased. From atomic force microscopy observations, the film deposited at the lowest power was found to have a rough surface consisting of coarse grains. This film exhibited the best photocatalytic performance during the decomposition of the organic dyes possibly due to the maximum relative content of anatase and the large surface area.

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